Reacción #928183

Ecuación de reacción

2-hydroxyethyl 5-norbornene-2-carboxylate

2,2′-azobisisobutyronitrile

maleic anhydride

mono-methyl cis-5-norbornene-endo-2, 3-dicarboxylate

tert-butyl 5-norbornene-2-carboxylate

→

Formula IV

Rendimiento 63.0%

tert-butyl 5-norbornene-2-carboxylate 2-hydroxyethyl 5-norbornene-2-carboxylate mono-methyl cis-5-norbornene-endo-2, 3-dicarboxylate maleic anhydride

Rendimiento 63.0%

Disolventes

tetrahydrofuran

toluene

Condiciones de reacción

Tratamiento posterior

1. 1
   Otroprepared
2. 2
   Otroprepared
3. 3
   Otroprepared
4. 4
   Otroaccording to Preparation Example VI
5. 5
   Otrowas performed at a temperature between 65° C. and 70° C. under nitrogen
6. 6
   OtroCrude product thus obtained
7. 7
   Otrowas precipitated from ethyl ether or hexane
8. 8
   Otrothe precipitate was dried

Procedimiento

In tetrahydrofuran or toluene, dissolved were maleic anhydride (1 mol), tert-butyl 5-norbornene-2-carboxylate (0.5-0.9 mol) prepared according to Preparation Example I, 2-hydroxyethyl 5-norbornene-2-carboxylate (0.05-0.8 mol) prepared according to Example II, and mono-methyl cis-5-norbornene-endo-2, 3-dicarboxylate (0.01-0.5 mol) prepared according to Preparation Example VI. then, 2,2′-azobisisobutyronitrile (AIBN) (0.5-10 g), as a polymerization initiator, was added thereto, and the reaction was performed at a temperature between 65° C. and 70° C. under nitrogen or argon atmosphere for 4-24 hours. Crude product thus obtained was precipitated from ethyl ether or hexane, and the precipitate was dried to give the title copolymer resin (Formula IV) having a molecular weight of 3,000-100,000 (yield: 63%). The copolymer resin thus prepared has high transparency to ArF light, increased etching resistance and excellent adhesiveness, and is developable by 2.38 wt % aqueous TMAH solution.

Fuente